CMP DUAL TRANSFER ROBOT

SHOULD ER WRIST

Unit 401-601 Bucheon Techno Park 193 Yakdae-Dong Wonmi-Gu Bucheon, Gyeonggi-Do / http://www.koro.co.kr

Contents

Contents
1. Mira 3400 CMP Equipment 2. KORO CMP ROBOT-Development 3. MIRRA Long Robot & KORO Comparison 4. Detailed Description of Layout
Dual Kit Composition

Robot Specifications Single & Dual system.

5. KORO CMP ROBOT- MIRRA LONG ROBOT Issues & Improvement Measures 7. KORO CMP ROBOT- MIRRA CONTROLLER PC BOARD Changes 8. KORO CMP ROBOT Local Production Diagram & Composition 9. KORO CMP ROBOT Local Production Diagram & Composition 10. CMP Local ROBOT Issues & Solutions 11. KORO CMP ROBOT Cable Wire Improvement 12. Actual Application

MIRRA 3400 CMP EQUIPMENT LAYOUT

No 1

Equipment Parts Wafer Transfer Robot Cleaner CMP Robot

Function Transfers wafer from cassette to unloading position of CMP ROBOT Loads wafersSHOULD ejected from cleaner into the cassette ER Cleaning wafers that complete the CMP process Loading : Transfer WRIST wafers from buffer zone to CMP polisher Unloading : Transfers ejected wafers from CMP polisher to the CMP cleaner Polishes wafers

2 3

CMP Polisher

KORO CMP ROBOT BASIC COMPOSITION

Functions Remarks

Each Axis

Z-Axis

X-axis

Main movement axis for transfer wafer from cassette to HCUL and ejected wafer for transfer to the cleaner

Z-Axis

Axis with up/down movement used for wafer loading and unloading Rotational axis (90o TURN) for transferring wafers from CMP ROBOT to HCUL and for changing wafer Rotational axis between 0 to 180 SHOULDER to hand dual wafers. WRIST

Shoulder Axis

Shoulder Wrist

Wrist Axis

2.
NO 1

KORO CMP ROBOT-Development Dual Kit Composition

DUAL KIT LIST ROBOT Machinery ASSY COMPOSITION Z AXIS Z T AXIS R AXIS UNIT 1SET 1SET 1SET 1SET 1SET 1SET 1SET 1SET 1SET REAMRKS

2 3

ROBOT Vacuum ASSY ROBOT CONTROLE ASSY

DUAL VACUUM UNIT Z AXIS MOTOR DRIVER T AXIS MOTOR DRIVER R AXISMOTOR DRIVER CMP INTERFACE CARD

Vacuum Dual Modification

Disassemble & Remove existing CMP vacuum & Single vacuum Dual Installation & Piping

1SET 1SET 1SET 1SET 1SET 1SET

ROBOT Control Wiring

Z,T,R AXIS WIRING

SHOULD WIRING INTERFACE

ROBOT & EQUIPMENT WIRING SENSOR, SIGNAL WIRING

ER

WRIST

DUAL RETRO MANUAL

ROBOT CONTROL & MACHNARY & AIR COMPRESSOR MAINTENCE MANUAL

3
Rotation Parts Z-AXIS

MIRRA Long Robot & KORO Robot Specifications Comparison

Mirra 3400 CMP robot Z,T,R Operation Parts Stroke Movement Parts Working Parts STEP MOTOR 150MM 1 LM GUIDE BAWL SCREW Each Axis Rotation Parts Z-AXIS KORO CMP Robot RATATE ONLY T,R AXIS Operation Parts Stroke Movement Parts Working Parts STEP MOTOR 251MM 2 LM GUIDE BAWL SCREW

Each Axis

ShoulderAxis

Operation Parts
Turn Angles Working Parts

STEP MOTOR
90 Reduction Gear Step Motor Rotate Wrist 180 Worm type reduction gear

T-Axis (Shoulder)

Operation Parts
Turn Angles Working Parts

STEP MOTOR
90 HAOMONIC REDUCTION GEAR Step Motor ROTATE RAXIS 180 HARMONIC REDUCTION GEAR

Wrist Axis

Operation Parts Rotation Parts Turn Angles Working Parts

Wrist Axis

Operation Parts Rotation Parts Turn Angles Working Parts

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EAXHAXIS ROBOT VACUUM

Detailed description of single and dual robot.

MIRRA SINGLE BLADE ROBOT KORO DUAL BLADE Z ROBOT DUAL VACUUM PROCESS Comparison

SINGLE VACUUM PROCESS

Significant expansion of vacuum capacity

Single Blade
Robot Control Worm Gear. 1. High Backlash 2. Limit of reduction ratio 3. Abrasion of gear tooth after sudden years that cause robot failure.

Blade
Harmonic Driver

Dual Blade
1. Backlash Free(17.5X15 rad) 2. High Torque Capacity 3. High Positional accuracy and high rotational accuracy. 4. Simple & compact configuration 5. Long lifetime

Through put 1 cycle

Productivity Improvement

SHOULD ER Productivity Improvement WRIST

10-20% up

4.

KORO CMP ROBOT- Single & Dual Differences

MIRRA SINGLE BLADE ROBOT KORO DUAL BLADE Z ROBOT

EAXH-AXIS

Note: Time can vary according to operating conditions per equipment; the values provided are general and are subject to variation. The dual robot has substantially higher vacuum capacity due to the switch from a single vacuum to double vacuum. The switch from the old motor driver to new motor driver improves reliability and significantly increase resolution, making precision control possible. The switch from a single blade to double blade facilitates the change from 1 wafer handling to 2 wafer handling System, thus remarkably cutting robot handling time.

SHOULD ER WRIST

6.

KORO CMP ROBOT- MIRRA LONG ROBOT Issues & Improvement Measures
Item Issue When LOAD occurs in the ROBOT MOTOR, SPEED cannot exceed a certain limit. Z: 10 RPM, X: 20 RPM, WRIST: 40 RPM, SHOULDER: 20 RPM POSITION FAILURE from SHOULDER WORM & Circular GEAR abrasion & damage FAILURE due to LOAD on the Z-axis MOTOR & BEARING from vibration generated when moving the X-axis and Z-axis ASSY Damage during TRACE process after ASSY disassembly due to BAR location at the corner on both sides of the ROBOT ASSY VOLTAGE HUNTING due to the sucking in of both DI and AIR into the TRANSDUCER during the WAFER CHUCK via the VACUUM CABLE splitting & SHORT of fixed part With an integrated CABLE, need for replacement of both the CABLE & SENSOR even if only one FAILS, and corresponding difficulty in disassembly and assembly Improvement Measure

ROBOT SPEED

Change MOTOR type to improve SPEED

SHOULDER GEAR

Change GEAR TYPE to a HARMONIC GEAR and lower SHOULDER position to modify mechanical structure so as not to be affected by LOAD Produce a dual structure LM GUIDE to facilitate LOAD handling and expand MOTOR capacity to prevent MOTOR & BEARING damage caused by LOAD and/or vibration Change production incorporating a modified SENSOR BAR structure and material composition (SUS material that does not break with change) Modify positioning to make replacement and the TRACE process more convenient Change SHOULDER rotation range from 720o to 360o & Change CABLE structure to U-shape

Z-AXIS MOTOR & BEARING

X-AXIS SENSOR BAR

TRANSDUCER

RIBBON CABLE

WRIST HOME SENSOR

Separate the CABLE & SENSOR and change WRIST structure

7.

KORO CMP ROBOT- MIRRA CONTROLLER PC BOARD Changes

PCB BOARD (0100-77068)

PCB BOARD Position Change

CABLE (0140-78208) CABLE (0140-78209)

BLACK BRACKET (0040-75097)

After placing PCB BOARD (0100-77068) on upper part of MAIN PCB BOARD, connect CABLE(0140-78208,9) to BOARD.
Detach CABLE (0140-75135,77219) MJ9, MJ18 from lower part of CONNECTOR BOARD, connect CABLE(0140-78208,9) with CABLE of PCB BOARD(0100-77068) MJ9,MJ18 on the opposite side. * BLACK BRACKET is exchanged in order to place PCB BOARD (0100-77068). If PCB BOARD (0100-77068) is placed separately on upper part, this task can be skipped.

8.

KORO CMP ROBOT Local Production Diagram & Composition

Z-Axis Z

Fitted Motor Z-Axis

Maximum Stop Rated Current Voltage Coil Resistance Product Name of Corresponding UNIT

Shoulder

WRIST

. Wrist
SHOULDER

SHOULDER

WRIST

Diagram

KORO CMP

9.

KORO CMP ROBOT- Features & Improvements

1. Only 90o rotation of SHOULDER-Axis (rather than 720o) reduces WAFER transfer time

2. LM GUIDE installed on both sides of Z-Axis, reducing load on Z-Axis MOTOR & BEARING and increasing usage life
3. Via MOTOR DRIVE performance improvement, MOVING speed is stable and no shift.

SHOULDER 90

90o Rotation

10.

CMP Local ROBOT Issues & Solutions

Unable to operate Teaching Parameters in the 180o Turn Area of the WRIST-Axis and SHOULDER-Axis (During WAFER transfer, area READY values are passed, but BLADE#2 READY value cannot be adjusted) Though PROGRAM is set to move BLADE#1 value to a fixed position, there is no PARAMETER value that can change this -> When rotating Shoulder value more than 90o, change Z-Axis movement to address issue of machinery collision before installation.

Change Shoulder value to above 90 when going up Z-axis

11.

KORO CMP ROBOT Cable Wire Improvement

Item
NODE

Issue

Improvement Measure(s)

NODE

Cable Wire

Wire installed to prevent Cable sagging snaps to cut Cable during movement -> Due to snapping

1) No snapping phenomenon apparent in installations from Aug. 2005 to present; wire Cable according to proven 914 model 2) Affix block to eliminate stress on Cable & install so that Cable and Body move in unison during movement to prevent snapping

12

Actual Application

PCB BOARD(0100-77068)

PCB BOARD Position Change

CABLE (0140-78208) CABLE (0140-78209)

BLACK BRACKET (0040-75097)

After placing PCB BOARD (0100-77068) on upper part of MAIN PCB BOARD, connect CABLE(0140-78208,9) to BOARD.
Detach CABLE (0140-75135,77219) MJ9, MJ18 from lower part of CONNECTOR BOARD, connect CABLE(0140-78208,9) with CABLE of PCB BOARD(0100-77068) MJ9,MJ18 on the opposite side. * BLACK BRACKET is exchanged in order to place PCB BOARD (0100-77068). If PCB BOARD (0100-77068) is placed separately on upper part, this task can be skipped.