Académique Documents
Professionnel Documents
Culture Documents
EmergingDevices
Outline
PowerJFETDevices
FieldControlledThyristor
MOSControlledThyristor
HighVoltageIntegratedCircuits/DiscreteModules
NewSemiconductorMaterials
CopyrightbyJohnWiley&Sons2003
EmergingDevices1
PowerJFETGeometry
N-channel JFET
gate
source
D
+
l
gs
Recessed gate
JFET
cross-section.
channel
l
gd
+
N
P-channel JFET
drain
GatesourcegeometryhighlyinterdigitatedasinMOSFETs.
Widthw=mstoafewtensofms;lc<w;lgsminimized.
lgdsetbyblockingvoltageconsiderations.
S
CopyrightbyJohnWiley&Sons2003
EmergingDevices2
PowerJFETIVCharacteristics
Output characteristics
iD
Transfer curve.
V
GS
VGS1
VGS2
VGS3
VGS4
vD
S
blocking
gain
VGS
v
D
S
PowerJFETisanormallyondevice.Substantialcurrentflowswhengate
sourcevoltageisequaltozero.
OppositetoBJTs,MOSFETs,andIGBTswhicharenormallyoffdevices.
CopyrightbyJohnWiley&Sons2003
EmergingDevices3
ControllingPotentialBarrierinJFETs
electron
V
potential
-V
=0
DS
(x)
CS
x
increasing
Suppresspotentialbarrierby
increasingVDSatfixedVGS.
WhenVDS>|VGS|substantial
draincurrentsflow.
V
DS
|VGS|>|Vp|(pinchoffvoltage)
potentialbarriertoelectronflow
fromsourcetodraincreated.No
draincurrentcanflow.
+
V
DD
Blockingcapabilitylimitedby
magnitudeofelectricfieldindrift
region.Longerdriftregionshave
largerblockingvoltagecapability.
+
P
E
GS
V (x)
CS
E
+
DS
V
GG
N
P
NormallyoffJFETcreatedby
havingnarrowenoughchannel
widthsothatthechannelispinched
offatzerogatesourcevoltage.
CopyrightbyJohnWiley&Sons2003
EmergingDevices4
JFETOnandOffStates
JFETinonstate
D
depletionregion
depletion
region
+
V
DD
P+
+
V
DD
-
P+
P+
P+
Channelopenbetweendrainandsource.
CopyrightbyJohnWiley&Sons2003
VGG
Channelpinchedoff(closed)between
drainandsource.
EmergingDevices5
BipolarStaticInductionTransistor(BSIT)
BSIT in blocking state
JFETinonstate
D
depletionregion
D
depletion
region
+
VDD
-
P+
+
V
P+
DD
P+
P+
Channelwidthandchanneldopingchosen
sothatatzerogatesourcevoltage,
depletionlayersofgatechanneljunction
pinchoffthechannel.
NarrowerchannelthannormallyonJFET.
CopyrightbyJohnWiley&Sons2003
GG
Forwardbiasgatechanneljunctionto
reducedepletionregionwidthandopenup
channel.
Substantialcurrentflowintogate.
EmergingDevices6
JFETSwitchingCharacteristics
EquivalentcircuitsofJFETSnearlyidenticaltothoseofMOSFETs
SwitchingwaveformsnearlyidenticaltothoseofMOSFETsincludingvaluesof
variousswitchingtimeintervals
JFETVGSstartsatnegativevaluesandstepstozeroatturnonwhileMOSFETVGSstarts
atzeroandstepstopositivevalueatturnon
FETonstatelossessomewhathigherthanforMOSFETtechnologyrelatednotfundamental
NormallyoffJFET(BipolarstaticinductiontransistororBSIT)switchingcharacteristics
moresimilartothoseofBJT
DifferencesbetweenBSITandBJTobservablemainlyatturnoff
1.BSIThasnoquasisaturationregionandthusonlyonecurrentfalltime(nocurrenttailing)at
turnoff.
2.OverallturnofftimesofBSITshorterthanforBJT
3.DifferencesduetofactthatBSIThasnoinlinepnjunctionthatcanblocksweepoutof
excesscarriersasdoesBJT
CopyrightbyJohnWiley&Sons2003
EmergingDevices7
FieldControlledThyristor(FCT)
VerticalCrosssection
Circuitsymbol
anode
cathode
gate
+
+
gate
cathode
+
P
anode
Injecting contact -
Sometimestermedabipolarstaticinductionthyristor(BSIThy).
CopyrightbyJohnWiley&Sons2003
EmergingDevices8
FCTIVCharacteristics
i
A
V
FCThasanormallyon
characteristic.
GK
V
GK2
GK1
GK3
Canbemadetohavea
normallyoff
characteristic.
-V
RM
V
AK
V
AK
blocking gain
1.Reducechannel
widthsothatzerobias
depletionlayerwidth
ofgatechannel
junctionpinchesoff
channel
2.Thentermeda
bipolarstaticinduction
thyristor(BSIThy).
V
GK
CopyrightbyJohnWiley&Sons2003
EmergingDevices9
PhysicalOperationofFCT
FCTessentiallyapowerJFETwithaninjectingcontactat
thedrain
Injectingcontactcausesconductivitymodulationofdrain
driftregionandresultsinmuchloweronstatelosses
Atturnoff,gatedrawslargenegativecurrentsimilartoa
GTObecauseofstoredchargeindriftregion
Cascodeswitching
circuit.
Implementanormally
offcompositeswitch.
R1andR2insurethat
voltageacross
MOSFETnotoverly
large.Permitsuseof
lowvoltagehigh
currentdevice.
HV
FCTnotalatchingswitchasisaGTO.FCThasno
regenerativeaction.
FCTcanbemadeanormallyoffdevicebyusingnarrow
channelwidthssothatzerobiaswidthgatedepletionlayer
pinchsoffchannel.
R1
Vcontrol
R2
EmergingDevices10
FCTSwitchingCharacteristics
FCTswitchingwaveformsqualitativelysimilartothyristororGTO
includinglargenegativegatecurrentatturnoff.
FCThasgatecontrolledturnonandturnoffcapabilitiessimilartoGTO.
FCTswitchingtimessomewhatshorterthanGTO.
GatedrivemustbecontinuouslyappliedtoFCTbecauseFCThasno
latchingcharacteristic.
FCThasmuchlargerreapplieddv/dtratingthanGTObecauseoflackof
latchingaction.
FCThasdi/dtlimitsbecauseoflocalizedturnonandthenexpansionof
turnedonregionacrossentiredevicecrosssection.
CopyrightbyJohnWiley&Sons2003
EmergingDevices11
JFETBasedDevicesVsOtherPowerDevices
BlockingvoltagecapabilityofJFETscomparabletoBJTsandMOSFETs.
JFETonstatelosseshigherthanMOSFETstechnologylimitation.
SwitchingspeedsofnormallyonJFETsomewhatslowerthanthoseofMOSFETtechnology
limitation.
BSITswitchingtimescomparabletoBJTsinprincipleshouldbefasterbecauseoflackofin
linepnjunctiontrappingstoredchargeatturnoff.
NosecondbreakdowninnormallyonJFETs,similartoMOSFETs.
BSITsandBSIThyhaveandpossiblylimitations.
JFETbasedpowerdevicesmuchlesswidelyusedbecauseofnormallyoncharacteristic.This
hasalsoslowedresearchanddevelopmenteffortsinthesedevicescomparedtootherdevices.
CopyrightbyJohnWiley&Sons2003
EmergingDevices12
PMCT(PtypeMOScontrolledThyristor
Unitcellverticalcrosssection
SiO
2
conductor
CompleteMCTcomposedof
tensofthousandsofidentical
cellsconnectedinparallel.
G
+
N
+
P
P
P
ONFET
ONFET
channel
channel
Pdesignationreferstodoping
ofthelightlydopedPlayer
whichcontainsthedepletion
layeroftheblockingjunction.
OFFFET
channels
+
N
NotethatONandOFFFETs
arepositionedattheanodeend
ofthedevice.
CopyrightbyJohnWiley&Sons2003
EmergingDevices13
PMCTEquivalentCircuit&CircuitSymbol
PMCTequivalentcircuit
PMCTcircuitsymbol
anode
anode
A
+
gat
gate
OFF-FET
AK
ON-FET
cathode
cathode
PMCTusedwithanodegrounded.
Gateanodevoltageisinputdrivevoltage.
UsePMCTincircuitswithnegativevoltages.
CopyrightbyJohnWiley&Sons2003
EmergingDevices14
NMCT(NtypeMOScontrolledThyristor
VerticalcrosssectionofNMCTunitcell
NMCTcomposedof
thousandsofcells
connectedelectricallyin
parallel.
SiO
2
conductor
+
P
Ndesignationreferstothe
Nlayerwhichcontainsthe
depletionlayerofthe
blockingjunction.
N
ONFET
ONFET
channel
channel
P
OFFFET
channels
NotethattheONandOFF
FETsarepositionedat
thecathodeendofthe
device.
CopyrightbyJohnWiley&Sons2003
EmergingDevices15
NMCTEquivalentCircuit&CircuitSymbol
NMCTequivalentcircuit
NMCTcircuitsymbol
anode
anode
ON-FET
gate
OFF-FET
gat
cathode
cathode
NMCTusedwithcathodegrounded.
Gatecathodevoltageisinputdrivevoltage.
UseNMCTincircuitswithpositivevoltages.
CopyrightbyJohnWiley&Sons2003
EmergingDevices16
GatecontrolledTurnonofMCTs
TurnonMCTbyturningontheONFET
PositivegatecathodevoltageforNMCT
NegativegateanodevoltageforPMCT
ThesepolaritiesofgatevoltageautomaticallykeeptheOFFFETincutoff.
ONFETdeliversbasecurrenttothelowgainBJTinthethyristorequivalentcircuit
and activatesthatBJT.
PNPtransistorintheNMCT
NPNtransistorinthePMCT
Lowgaintransistoractivatesthehighergaintransistorandthyristorlatcheson.
Oncehighergaintransistor,whichisinparallelwithONFETisactivated,current
isshuntedfromONFETtotheBJTandtheONFETcarriesverylittlecurrentin
theMCTonstate.
Only510%ofthecellshaveanONFET.
Cellsareclosepacked.Withinoneexcesscarreierdiffusionlengthofeachother.
AdjacentcellswithoutanONFETturnedonviadiffusionofexcesscarriersfrom
turnedoncell.
CopyrightbyJohnWiley&Sons2003
EmergingDevices17
GatecontrolledTurnoffofMCTs
TurnMCToffbyturningontheOFFFET
NegativegatecathodefortheNMCT
PositivegateanodevoltageforthePMCT
ThesegatevoltagepolaritiesautomaticallykeeptheONFETincutoff.
OFFFETshuntsbasecurrentawayfromthehighergainBJTinthethyristor
equivalentcircuitandforcesittocutoff.
NPNtransistorintheNMCT.
PNPtransistorinthePMCT.
CutoffofhighergainBJTthenforceslowgainBJTintocutoff.
EveryMCTcellhasanOFFFET.
OFFFETkeptactivatedduringentireMCToffstatetoinsurenoinadvertent
activationofthethyristor.
CopyrightbyJohnWiley&Sons2003
EmergingDevices18
MaximumControllableAnodeCurrent
IfdrainsourcevoltageofOFFFETreachesapproximately0.7Vduringturnoff,
thenMCTmayremainlatchedinonstate.
HighergainBJTremainsonifOFFFETvoltagedrop,whichisthebaseemitter
voltageoftheBJTreaches0.7volts.
Thusmaximumonstatecurrentthatcanbeturnedoffbymeansofgatecontrol.
PMCThaveapproximatelythreetimeslargergatecontrolledanodecurrent
ratingthanasimilar(samesizeandvoltagerating)NMCT.
OFFFETofthePMCTisannchannelMOSFETwhichhasthreetimeslarger
channelmobilitythanthepchannelOFFFEToftheNMCT.
CopyrightbyJohnWiley&Sons2003
EmergingDevices19
RationaleofOFFFETPlacement
PMCTcrosssectionshowing
rationaleforOFFFETplacement
A
G
N
P
OFF-FET
P+
+
P
OFF-FET
N
P
CopyrightbyJohnWiley&Sons2003
EmergingDevices20
MCTSwitchingWaveforms
Gate-cathode
NMCTStepdownConverter
voltage
V
Tn
I
o
V
Tp
t
V
d
N-MCT
d,off
fv1
Anode-cathode
voltage
rv1
fv2
V
d
PMCTStepdownConverter
t
rv2
Anode
current
I
o
V
d
P-MCT
t
ri2
fi1
t
d,on
CopyrightbyJohnWiley&Sons2003
t
ri1
t
fi2
EmergingDevices21
MCTTurnonProcess
Turnondelaytimetd,ontimerequiredforgatevoltagetoreachONFETthreshold
startingfromreversebiasvalueofVGG,off
Currentrisetimetri1andtri2
tri1;ONFETturnsonacceptingallthecurrentthegatedrivevoltagewillpermit.
ONFETinitsactiveregion.
tri2;NPNandPNPBJTsturnonandcurrentshuntedawayfromONFET.BJTs
andONFETintheiractiveregions.
Voltagefalltimetfv1andtfv2
tfv1;BJTsintheiractiveregionssovoltagefallinitiallyfast.
tfv2;BJTsinquasisaturation,sotheirgainisreducedandrateofvoltagefall
decreases.
Atendofvoltagefalltimeinterval,BJTsenterhardsaturationandMCTisin
theonstate.
Gatecathodevoltageshouldreachfinalonstatevalueintimesnolongerthana
specifiedmaximumvalue(typically200nsec).Insurethatallparalleledcellsturnon
atthesametimetominimizecurrentcrowdingproblems.
Keepgatecathodeatonstatevalueforthedurationoftheonstatetominimize
likelyhoodofinadvertantturnoffofsomecellsifcurrentissubstantiallyreduced
duringonstate.
CopyrightbyJohnWiley&Sons2003
EmergingDevices22
MCTTurnoffProcess
Turnoffdelaytimetd,offtimerequiredtoturnofftheONFET,activatetheOFF
FET,andbreakthelatchingconditionbypullingtheBJTsoutofhardsaturation
andintoquasisaturation.
Requiresremovalofsubstantialamountofstoredcharge,especiallyinthebase
regionsofthetwoBJTs(n1andp2thyristorlayers).
Voltagerisetimestrv1andtrv2
trv1;timerequiredtoremovesufficientstoredchargesothatBJTsleavequasi
saturationandenteractiveregionandblockingjunction(J2)becomesreverse
biased.
trv2;BJTsinactiveregionandtheirlargergaincauses anodevoltagetorapidly
completegrowthtopowersupplyvoltageVd
Currentfalltimetfi1andtfi2
tfi1;InitialrapidfallincurrentuntilhighgainBJT(NPNBJTinthePMCT
equivalentcircuit)goesintocutoff.
tfi2;storedchargestillremaininginbase(driftregionofthyristor)ofthe
lowgainBJTremovedinthisinterval.Theopenbasenatureoftheturnoff
casuseslongertimeintervalgivinga"tail"totheanodecurrentdecay.
Gatecathodevoltagekeptatoffstatevalueduringentireoffstateintervalto
preventaccidentalturnon.
CopyrightbyJohnWiley&Sons2003
EmergingDevices23
MCTOperatingLimitations
Imaxsetbymaximumcontrollableanodecurrent.
Presentlyavailabledeviceshave50100Aratings.
Vmaxsetbyeitherbreakovervoltageofthyristor
sectionorbreakdownratingoftheOFFFET.
Presentlyavailabledevicesratedat600V.10002000
vdevicesprototyped.
MCTsafeoperatingarea.Very
conservativelyestimated.
Anode
current
I
max
dvDS
dt limitedbymechanismsidenticaltothosein
thyristors.Presentlyavailabledevicesratedat500
1000V/sec.
diD
dt limitedby potential currentcrowdingproblems.
Presently available devi
ces rated at 500
A/sec.
CopyrightbyJohnWiley&Sons2003
Anode-cathode voltage
BO
EmergingDevices24
HighVoltage(Power)IntegratedCircuits
ThreeclassesofpowerICs
1.Smartpowerorsmart/intelligentswitches
Verticalpowerdeviceswithonchipsenseandprotectivefeaturesand
possiblydriveandcontrolcircuits
2.Highvoltageintegratedcircuits(HVICs)
ConventionalICsusinglowvoltagedevicesforcontrolanddrive
circuitsandlateralhighvoltage powerdevices
3.Discretemodules
Multiplechipsmountedonacommonsubstrate.Separatechipsfor
drive,control,andpowerswitch andpossiblyotherfunctions.
PICrationale
Lowercosts
Increasedfunctionality
Higherreliability
Lesscircuit/systemcomplexity
CopyrightbyJohnWiley&Sons2003
EmergingDevices25
IssuesFacingPICCommercialization
Technicalissues
Electricalisolationofhighvoltagedevicesfromlowvoltagecomponents
Thermalmanagementpowerdevicesgenerallyoperateathigher
temperaturesthanlowpowerdevices/circuits.
OnchipinterconnectionswithHVconductorrunsoverlowvoltage
devices/regions.
Fabricationprocessshouldprovidefullrangeofdevicesandcomponents
BJTs,MOSFETs,diodes,resistors,capacitors,etc.
Economicissues
Highupfrontdevelopmentcosts
RelativecostofthethreeclassesofPICs
Needforhighvolumeapplicationstocoverdevelopment
expenses.
CopyrightbyJohnWiley&Sons2003
EmergingDevices26
DielectricIsolation
Si0 2
N+
B
N+
Dielectricallyisolatedtubs
SiO2isolationandsilicon
thinfilmovergrowth.
N
+
Si wafer
Si wafer
SiO
2
Si wafer with SiO
2
Wafers bonded together
metallurgically
Waferbondingand
subsequentwafer
thinning.
Bottom wafer
Clean, flat surfaces
dielectrically isolated
contacted at elevated
from top thin Si film
temperatures under
pressure
CopyrightbyJohnWiley&Sons2003
EmergingDevices27
SelfIsolationandJunctionIsolation
Lateral Logic
Level MOSFET
Lateral HV MOSFET
Selfisolationonlyfeasible
withMOSFETdevices.
P substrate
isolatedregions
+
N
Junctionisolation.
parasitic
CopyrightbyJohnWiley&Sons2003
diode
EmergingDevices28
HighVoltageLowVoltageCrossovers
Electricfieldlines
Metalat+V
SiO
2
+
N
Fieldcrowdingand
prematurebreakdown.
+
P
depletion
layer
P@V
Polysilicon
Metalat+V
fieldshield
SiO
2
+
N
depletion
layer
Useoffieldshieldsto
minimizefieldcrowding
problemsatHV/LV
crossovers.
P@V
CopyrightbyJohnWiley&Sons2003
EmergingDevices29
SmartorIntelligentSwitchUsingMOSFETs
Lateral Logic
Level MOSFET
+
P
N
N
+
P
+
P
Diode
Crosssectional
diagramofswitch.
P
+
D
Circuitdiagram
Addadditionalcomponentsonvertical
MOSFETwaferaslongasnomajor
processchangesrequired.
Diode
Power
Lateral Logic
MOSFET
Level MOSFET
CopyrightbyJohnWiley&Sons2003
PNjunctionformedfromNdriftregion
andPbodyregionalwaysreversebiased
ifdrainofpowerMOSFETpositive
respecttosource.Provideselectrical
isolationofthetwoMOSFETs.
EmergingDevices30
SmartPowerSwitchUsingBJTs
Lateral Logic
Vertical Power
Lateral Logic
NPN BJT
+
P
N
P
P
Crosssectionalview
P
-
epi
epi
epi
+
+
N
P-epi
+
N
ThreeelectricallyisolatedBJTsdiagramed
PNjunctionisolationviaPepiandtopsideP+diffusion
Doubleepitaxialprocesssquence
PepigrownonN+substrate
N+buriedlayerdiffusedinnext
NepifordriftregiongrownoverPepi
P+isolationdiffusionstoPepi
DiffusionforbaseandemittersofBJTs
CopyrightbyJohnWiley&Sons2003
EmergingDevices31
HighVoltageIntegratedCircuits(HVICs)
Lateral HV
DMOSFET
Lateral Logic
Lateral Logic
P
epi
+
P
+
P
+
N
epi
epi
HVICusing
junctionisolation
+
N
P-substrate
Lateral HV
Lateral Logic
N-channel
Lateral Logic
Level N-MOSFET
Level P-MOSFET
DMOSFET
G
S
D
+
N
+
P
N
+
HVICusingself
isolation
P substrate
CopyrightbyJohnWiley&Sons2003
EmergingDevices32
DiscreteModuleExampleIXYSI3MIGBTModule
Intelligentisolatedhalfbridge
200A1080V
Builtinprotectionandsensingof
overcurrents,overvoltages,
overtemperatures,shortcircuits.
ModuleswithonlyIGBTsandanti
paralleldiodesavailablewith
ratingsof3300V1200A
CopyrightbyJohnWiley&Sons2003
EmergingDevices33
IGCTIntegratedGateCommutatedThyristor
Turn-on
Q1
C1
Cn
Qn
10V - 5A
GCT Gate
Control
Q1
Qn
20V - 6 A
C1
SpeciallydesignedGTOwithlow
inductancegatedrivecircuit
Ratings
Blockingvoltage4500V
Controllableonstatecurrent4000A
Averagefwdcurrent1200A
Switchingtimes10sec
CopyrightbyJohnWiley&Sons2003
Cn
C2
50,000 F
GCT Cathode
Turn-of
Approximategatedrivecircuit
Ion500A10sec
Iofffullforwardcurrent10usec
Verylowseriesinductance3nH
EmergingDevices34
EmitterTurnoffThyristor
Q1
C1
Cn
Qn
10V - 5A
GTO or GCT
Control
Qn
Q1
Qn
Q1
PerformancesimilartoIGCTs
AdvantagesoverIGCTs
Simplerdrivecircuit
EasiertoparallelMOSFETsinserieswithGTO
havepositivetemperaturecoefficient
SeriesMOSFETscanbeusedforovercurrentsensing
CopyrightbyJohnWiley&Sons2003
EmergingDevices35
EconomicConsiderationsinPICAvailability
PICdevelopmentcosts(exclusiveofproductioncosts)
Discretemoduleshavelowerdevelopmentcosts
LargerdevelopmentcostsforsmartswitchesandHVICs
Productioncosts(exclusiveofdevelopmentcosts)ofsmartswitchesand
HVICslowerthanfordiscretemodules.
ReliabilityofsmartswitchesandHVICsbetterthandiscretemodules.
Greaterflexibility/functionalityindiscretemodules
Widerrangeofcomponentsmagnetics,optocouplers
PICswillbedevelopedforhighvolumeapplications
Automotiveelectronics
Telecommunications
Powersupplies
Officeautomationequipment
Motordrives
Flourescentlightingballasts
CopyrightbyJohnWiley&Sons2003
EmergingDevices36
SummaryofSiliconPowerDeviceCapabilities
Vof
Thyristors
5 kV
4 kV
3 kV
IGBT
s
2 kV
MCT
s
Io
n
BJTs
1 kHz
1 kV
10 kHz
MOSFET
s
100 kHz
1 MHz
500 A
1000 A
1500 A
2000 A
3000 A
Frequency
CopyrightbyJohnWiley&Sons2003
EmergingDevices37
NewSemiconductorMaterialsforPowerDevices
Siliconnotoptimummaterialforpowerdevices
Galliumarsenidepromisingmaterial
Higherelectronmobilities(factorofabout56)fasterswitchingspeeds
andloweronstatelosses
LargerbandgapEghigheroperatingtemperatures
Siliconcarbideanotherpromisingmaterials
LargerbandgapthansiliconorGaAs
MobilitiescomparabletoSi
Significantlylargerbreakdownfieldstrength
LargerthermalconductivitythanSiorGaAs
Diamondpotentiallythebestmaterialsforpowerdevices
Largestbandgap
Largestbreakdownfieldstrength
Largestthermalconductivity
LargermobilitiesthansiliconbutlessthanGaAs
CopyrightbyJohnWiley&Sons2003
EmergingDevices38
PropertiesofImportantSemiconductorMaterials
Property
Si
GaAs
3CSiC
6HSiC
Bandgap@300
CopyrightbyJohnWiley&Sons2003
Diamond
EmergingDevices39
OnStateResistanceComparisonwithDifferentMaterials
Specificdriftregionresistanceofmajoritycarrierdevice
4q(BVBD)2
RonA
emn(EBD)3
Normalizetosiliconassumeidenticalareasandbreakdown
voltages
Ron(x)A
eSimSi
Ron(Si)A=resistanceratio= exmx
CopyrightbyJohnWiley&Sons2003
EmergingDevices40
MaterialComparison:PNJunctionDiodeParameters
ApproximatedesignformulasfordopingdensityanddriftregionlengthofHVpn
junctions
BasedonstepjunctionP+NN+structure
e[EBD]2
Nd=driftregiondopinglevel2qBV
BD
2BVBD
Wd=driftregionlength E
BD
Numericalcomparison1000Vbreakdownrating
Material
Nd
Si
1.3x1014
GaAs
5.7x1014
50
SiC
1.1x1016
10
Diamond
1.5x1017
CopyrightbyJohnWiley&Sons2003
cm3
Wd
67m
2
EmergingDevices41
MaterialComparison:CarrierLifetimeRequirements
Driftregioncarrierlifetimerequiredfor1000Vpnjunctiondiode
Approximatedesignformulabasedonstepjunction
CopyrightbyJohnWiley&Sons2003
EmergingDevices42
RecentAdvances/Benchmarks
Galliumarsenide
600VGaAsSchottkydiodesannouncedbyMotorola.250VavailablefromIXYS
3GaAswafersavailable
Siliconcarbide
3wafersavailablefromCreeResearchexpensive
600V6ASchottkydiodesavailablecommerciallyInfineonTechnologiesAG(Siemensspinoff)
Controlledswitchesalsodemonstrated
1800V3ABJTwithbetaof20
3100V12AGTO
Diamond
Polycrystallinediamondfilmsofseveralmicronthicknessgrownoverlarge(square
centimeters)areas
Simpledevicestructuresdemonstratedindiamondfilms.
PNjunctions
Schottkydiodes
CopyrightbyJohnWiley&Sons2003
EmergingDevices43
Projections
GaAs
DevicessuchasSchottkydiodeswhicharepreesentlyatornear
commercialintroductionwillbecomeavailableandused.
GaAsdevicesofferonlyincrementalimprovementsinperformanceover
SidevicescomparedtoSiCordiamond.
BroadintroductionofseveraltypesofGaAsbasedpowerdevices
unlikely.
SiC
RapidadvancesinSiCdevicetechnology
SpurredbythegreatpotentialimprovementinSiCdevicescomparedto
Sidevices.
CommerciallyavailableSiCpowerdeviceswithin510years.
Diamond
Researchconcentratedinimprovingmaterialstechnology.
Growthofsinglecrystalmaterial
Ancilliarymaterialsissuesohmiccontacts,dopants,etc.
Nocommerciallyavailablediamondbasedpowerdevicesinthe
forseeablefuture(next1020years).
CopyrightbyJohnWiley&Sons2003
EmergingDevices44