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Illustration of the
Technology Scale down
Etienne Sicard
etienne.sicard@insa-tlse.fr
http://intrage.insa-tlse.fr/~etienne
Summary
1. Whos who
2. Road map
3. The MOS device
4. The inverter
5. Conclusion
Philips
Philips Ibm
ST rennes
Atmel Atmel
ST Tours ST Grenoble
Texas, VLSI
Motorola ST, Atmel Cadence
100K
Year
83 86 89 92 95 98 01 04
Anne
03/12/17 E. Sicard - Technolog 4
2. Roadmap
Technology
(m) 2.0
80286 Production
80386
1.0 486
pentium
0.3 pentium II
0.2 Pentium IV
Research
0.1
0.05
0.03
83 86 89 92 95 98 01 04
Year
03/12/17 E. Sicard - Technolog 5
2. Roadmap
Leti
1 MOS
0.02m
Dec. 2000
IBM
106 MOS
0.015m
Nov. 2001
03/12/17 E. Sicard - Technolog 6
2. Roadmap
0.5 m 0.18 m 0.12m
Devices
1995
2000 2002
Frequency
2.5
1.5
Core trend
Technology (m)
0.5 0.35 0.18 0.10 0.07
03/12/17 E. Sicard - Technolog 9
2. Roadmap
Radiation
Typical wire load (fF)
100
75
50
25 Charge
Charges (C.V) Technology
0.5 0.35 0.18 0.10 0.07 (m)
Soft error due to radiation becomes probable
03/12/17 E. Sicard - Technolog 10
3. The MOS device
1 3 2
I V
3
demo
1 Little quiz 2
V
03/12/17 E. Sicard - Technolog 11
3. The MOS device
0 1
0 1
1 1
1
0 Good 0 Bad 1
0 0
1
0 Good 1
Bad 0
10 M 0.1 1 MT block
1 M 0.01
100K Low leakage MOS 0.001
Technology (m)
0.5 0.35 0.18 0.10 0.07
03/12/17 E. Sicard - Technolog 14
3. The MOS device
Low power
High Speed High Voltage
3.3V
Out
Time
In0.25m typical delay 50ps
Depends on conditions (10,90%)
demo
Depends on charge (capacitance)
03/12/17 E. Sicard - Technolog 16
4. The inverter
Idd (mA)
In, Out
(V)
Time
Delay (ns)
Interconnection (m)
0.25m