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1.

Illustration of the
Technology Scale down
Etienne Sicard

etienne.sicard@insa-tlse.fr
http://intrage.insa-tlse.fr/~etienne
Summary

1. Whos who
2. Road map
3. The MOS device
4. The inverter
5. Conclusion

03/12/17 E. Sicard - Technolog 2


1. Whos who in France

Philips
Philips Ibm
ST rennes

Atmel Atmel
ST Tours ST Grenoble

Texas, VLSI
Motorola ST, Atmel Cadence

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2. Roadmap
Bits
10 DRAM 4G
1G
GIGA
256M
1 GIGA
64M
100 MEG
16M
4M
10 MEG
1M
1 MEG 256K

100K
Year
83 86 89 92 95 98 01 04
Anne
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2. Roadmap
Technology
(m) 2.0
80286 Production
80386
1.0 486
pentium
0.3 pentium II
0.2 Pentium IV
Research
0.1

0.05
0.03

83 86 89 92 95 98 01 04
Year
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2. Roadmap
Leti
1 MOS
0.02m
Dec. 2000

IBM
106 MOS
0.015m
Nov. 2001
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2. Roadmap
0.5 m 0.18 m 0.12m

Devices

1995
2000 2002

Interconnects 3 layers 7 layers 8 layers

Frequency

120MHz 500MHz 1500 MHz


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2. Roadmap
Technology Year Metal Supply (V) Oxide(A) Vt (V) ST technology
0.7m 1988 2 5.0 200 0.7 Hcmos4
0.5m 1992 3 3.3 120 0.6 Hcmos5
0.35m 1994 5 3.3 75 0.5 Hcmos6
0.25m 1996 6 2.5 65 0.45 Hcmos7
0.18m 1999 7 1.9 50 0.40 Hcmos8
0.12m 2001 8 1.5 40 0.30 Hcmos9
0.10m 2003 8-9 1.0 35 0.25 Hcmos10

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2. Roadmap
Supply (V)
Chip I/Os
5.0
I/O trend
3.3 Chip Core

2.5
1.5
Core trend

Technology (m)
0.5 0.35 0.18 0.10 0.07
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2. Roadmap
Radiation
Typical wire load (fF)

100

75

50

25 Charge
Charges (C.V) Technology
0.5 0.35 0.18 0.10 0.07 (m)
Soft error due to radiation becomes probable
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3. The MOS device

1 3 2

I V
3
demo
1 Little quiz 2
V
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3. The MOS device

0 1

0 1

Ron close from 1000 demo

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3. The MOS device

1 1
1
0 Good 0 Bad 1

0 0
1
0 Good 1
Bad 0

Technology scale down keeps those drawbacks


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3. The MOS device
R off Static
Current (A)
100 M 1

10 M 0.1 1 MT block

1 M 0.01
100K Low leakage MOS 0.001

Technology (m)
0.5 0.35 0.18 0.10 0.07
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3. The MOS device
Low power
High Speed High Voltage

3.3V

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4. The inverter
In

Out

Time
In0.25m typical delay 50ps
Depends on conditions (10,90%)
demo
Depends on charge (capacitance)
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4. The inverter
Idd (mA)

In, Out
(V)
Time

Current peaks 0.2mA


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4. The inverter

Delay (ns)

Interconnection (m)

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4. The inverter
Ring oscillator
0.7m

0.25m

Frequencies x 5 although VDD divided by 2


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Conclusion

Illustration of technology scale down


Continuous gain in frequency
Power supply reduction
The MOS keeps the same, but many versions
Increased interconnects improve density
In 2002, ST will produce the 0.12m technology

03/12/17 E. Sicard - Technolog 20

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