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Hanoi University of
Science and Technology
Lise Meitner Pierre Auger

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 Qa trnh Auger

o nng lng ng hc
ca electron nhy ra
Chm chn khng
Electron
(5 kV)
Mt electron c
M nng lng cao hn
nhy ra bi nng
lng d tha

L Electron nhy ra khi nhn

Electron cao hn
K
Nhy vo l trng 3
Ekinetic = E(K) - E(L) -
E(L)
 ng lng ca electron Auger

KE of Auger electron ~ EA EB - EC

Nng lng pht ra ca electron thot ra

Nng lng cn thit vt qua BE

NOTE: ng lng ca electron Auger khng t l theo nng lng bn

Different from XPS

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 KLM
Ngun gc ca electron Auger

Gc ca electron ni ra

Nhn l trng ban u

Bn loi chnh l:
KLL, LMM, MNN, NOO

Khi s nguyn t tng ln, s lng chuyn

i electron cng c th tng cao.

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Hiu sut Auger

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 su thot electron

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 Cu to thit b ca php o AES

V c bn thit b phi c bo v khi trng lc t gy ra bi Tri t 8

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Mi trng UHV

UHV l mi trng c chn khng cc cao

Loi b cc cht kh hoc cht nhim hp th trn b mt mu.

Ci thin ng dn ca dng electron, ion hay proton

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Cu to ca Sng bn in t ( Electron Gun )

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Cu to ca Sng bn in t ( Electron Gun )

Tc phn tch

phn gii khng gian mong mun

Tia gy ra thay i b mt mu

Khong s dng thng l gia 10-9 v 5.10-6A

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B tng hp nng lng

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Cylindrical mirror analyzer(CMA)

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Cylindrical mirror analyzer(CMA)

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Cylindrical mirror analyzer(CMA)

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 Magnetic Shield

Chn t trng thng c

lm bng Mu kim loi.

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 Magnetic Shield

Thnh phn

17% thm thu cao

4%
Ni
14% Fe dy 5mm
65%
Cu
Cr + Molyden

S dng 5 lp gim t
trng 1500 ln

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Henmispherical Analyzers

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Henmispherical Analyzers

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Phn tch ph Auger

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Ph Auger in hnh

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Mt s ng dng ca ph Auger

Quang ph Auger c s dng phn tch b mt mu. 25

Thng tin b mt ca vt liu th hin trn ph Auger

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 - Pht hin cc nguyn t nh tnh c trong vt liu

- Xc nh nng nguyn t c trong mu:

Trong

=

- AES c th cung cp hnh nh in t ca b mt vt mu.

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Hnh nh Auger th hin s phn b cc pha crom cacbon nit. 28
u nhc im ca phng php

a) u im:
- C th pht hin tt c cc nguyn t tr H v Heli
- Khng ph hy b mt mu.
- nhy rt cao t 0.1 1%.
- Phn tch b mt vi su 0.5 5 nm.
- Phn tch c mu c rng ln nht l 50x10 mm, nhng
thng dng 10x1 mm.

b) Nhc im:
- Vt mu phi t trong mi trng chn khng cao.
- Phi chun b mu k v lm sch mu.
- Cng dng in t Auger rt yu nn detector phi nhy v
c t su vo trong my v nu detector c t ngoi th in
t th cp, tn x tia X c th ph v detector.
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 So snh vi phng php XPS
c im XPS AES
Chm tia phn tch Tia X Chm electrons
Phn tch Nng lng electrons Nng lng electrons
Loi mu Tt c loi mu Vt liu dn in
Din tch b mt 10 10 nm
phn tch
su b mt phn 1 5 nm 1 5 nm
tch
Nguyn t c th Tt c tr H2, He Tt c tr H2, He
xc nh
nhy 0.1% 0.1% - 1%
Tc ng ln mu Gy ph hy mu Khng nh hng n
Tch in cho mu mu

Thi gian phn tch Thi gian phn tch lu Phn tch nhanh hn
Kh nng phn tch Phn tch trng thi ha
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hc tt, chnh xc hn