Microscopa Electrnica

The spatial resolution of a compound

microscope is limited by diffraction at the
objective lens

Earlyinthe20thcentury,physicistsdiscovered
thatmaterialparticlessuchaselectronspossess
awavelikecharacter.InspiredbyEinsteins
photondescriptionofelectromagneticradiation,
LouisdeBroglieproposedthattheirwavelength
isgivenby
= h / p = h/(mv)

whereh = 6.62610-34 JsisthePlanckconstant; x

p,m,andvrepresentthemomentum,mass,and
speedoftheelectron.Forelectronsemittedinto
vacuumfromaheatedfilamentandaccelerated
throughapotentialdifferenceof50V,
v 4.2 106 m/s and0.17 nm.

MicroscopioElectrnicodeTransmisin(TEM)

Loa

ThemodernsTEMuseenergiesaround200kV,itcanbeconcludedthattheTEM,as
comparedtothelightmicroscopeoffersaresolutionthatisafactor10003000better
thanthelightmicroscope,i.e.theminimalspacingdiscernableisabout0.10.3nm.
The optical electron beam diagram of TEM.
ElectronGun
Magneticelectronlenses;ImagingandDiffractionModes

FuerzadeLorentz

Cubic System, Miller indices

 The Diffraction Pattern; the Zone Law
Ifthedirectionoftheincidentelectronbeamiss[uvw]in the crystal coordinate system concerned,it
holds, forthediffracting single crystal, for all (hkl) families of crystallographicplanes belonging to the
zone axis [uvw]: hu + kv + lw = 0. The HKL diffraction spots in the electron diffraction pattern must
satisfythisrelation.
Crystallinediffractionpatternfroma
twinnedgrainofFCCAusteniticsteel

A polycrystalline Gold film

ImagingModeTEM

GoldNanoparticles

TEMmicrographsofthesteelafterlargestrainwarmdeformation
(=1.6)andasubsequent2hannealingprocessat823K(Fig.1(b)
and (c)): (a,c) deformed microstructure; (b,d) annealed
microstructure. (Arrows 1 point at the fine cementite particles
CarbonNanotubes insidetheferritegrains.Arrows2pointatthecoarsecementite
particlesattheferritegrainboundaries.)
Transmission electron micrograph of
dislocations in steel, which are faults
inthestructureofthecrystallatticeat
theatomicscale
AtomicresolutionTEMimageofatripleand
aquadruplelineattheinterfacebetween3
boundaries and a 9 boundary in
nanocrystalline palladium. H. Rsner and C.
Kbeletal.,ActaMat.,2011,59,7380-7387.
This is a C. elegans embryo (surrounded by other embryos) at
the 2-cell stage (the two big gray spots are its two nuclei). The
magnification is about 5,000X.
Limitations of TEM

Interpreting transmission images

Electron beam damage

High-resolutionTEMimagesattheslitedgeoftheGaAssamplespreparedbyslitfocusedionbeam.The
thicknessoftheamorphouslayerproducedbyfocusedionbeamisshownineachimage.
TEM Specimen Preparation
ProceduresusedinmakingTEM
specimens:
(a)diskcuttingbyultrasonicdrill,
(b)dimplegrinding
(c)ultramicrotomy,
(d)grindingtoapowder
(e)chemicaljetthinning
(f)electrochemicalthinning
(g)ion-beamthinning
(h)vacuumdepositionofathinfilm.

Methods(a)-(d)aremechanical,(e)
and(f)arechemical,(g)and(h)are
vacuumtechniques.
Microscopio Electrnico de Barrido (SEM)
SEMDetectors

SEDetector
BSEDetector
Esferas60mPMMA50x
 (a) Secondary-electronimageofa
smallcrystal;
(b) (b)Backscattered-electron
image,whichalsoshows
topographicalcontrastand
shadowingeffects.

Top:backscatteredelectronanalysis
compositionBottom: secondary
electronanalysistopography
Scanning-Probe Microscopes
Scanning Tunnelling Microscopy (STM)

STMenUHV(P10-10Torr)
STM

Si(111)7x7 HOPG
Atomic Force Microscope (AFM)