Data Cpk Calculation Normal Distribution Plot

Items Data n-sigma x

1 123.32 LSL: 120 -5.00 110.28
2 131.61 USL: 150 -4.50 112.13
3 130.77 Cpk: 0.79 -4.00 113.98
4 125.40 -3.50 115.83
5 133.33 -3.00 117.68
6 130.07 -2.50 119.53
7 121.54 -2.00 121.38
8 128.25 -1.50 123.23
9 130.16 -1.00 125.08
10 127.51 -0.50 126.93
11 130.80 0.00 128.78
12 132.62 0.50 130.63
MIN 121.54 1.00 132.48
MAX 133.33 1.50 134.33
RANGE 11.79 2.00 136.18
AVG 128.78 2.50 138.03
STDEV 3.70 3.00 139.88
3.50 141.73
4.00 143.58
4.50 145.43
5.00 147.28
tribution Plot

normdist
4.0E-07
4.3E-06 WF etch depth distribution
3.6E-05 1.2E-01
2.4E-04
1.2E-03 1.0E-01
4.7E-03
1.5E-02 Probability distribution 8.0E-02
3.5E-02
6.5E-02
6.0E-02
9.5E-02
1.1E-01
9.5E-02 4.0E-02
6.5E-02
3.5E-02 2.0E-02
1.5E-02
4.7E-03 0.0E+00
1.2E-03 100.00 105.00 110.00 115.00 120.00 125.00 130.00 135.00 140.00 145.00 150
2.4E-04 WF Etch Depth
Polari
3.6E-05
4.3E-06
4.0E-07
stribution

30.00 135.00 140.00 145.00 150.00 155.00 160.00

Depth
Polaris WF