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Development of inkjet-printed inverters


Chu, Ta-Ya; Dadvand, Afshin; Graddage, Neil; Py, Christophe; Lang,
Stephen; Tao, Ye

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https://doi.org/10.4224/23000711

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Development of inkjet-printed inverters

Ta-Ya Chu, Afshin Dadvand, Neil Graddage, Christophe Py, Stephen Lang,
and Ye Tao
Outline

• Introduction

• Development of 3-layer-printed OTFTs

• Different types of printed inverter developed at NRC


 Enhancement-load PMOS inverter
 PMOS inverter (screen printed resistor)
 CMOS inverter

• Stability of printed inverter


Challenges in printing process
2200
Organic light emitting
2000 Organic transistor
Printed transistor
1800 Challenges  yield, stability
1600
 Uniformity, Roughness
Number of publication

1400
 Interface interaction
1200
 Solvents compatibility
1000

800
 Drying process
600
 Printing platform
400

200

0
1985 1990 1995 2000 2005 2010 2015
Year

Thermal evaporation
Spin coating Printing process
Polymer based transistor backplane is required for
flexible/bendable electronics in the future

Polyera smartwatch using OTFTs Flexible Curved Foldable Bendable

Spin coated dielectric and sputtered gate electrode


NRC 3-Layer-Printed Organic Thin Film Transistors (OTFTs)

Inkjet printed layers


 No spin coating process
 Organic semiconductor
 Printing process in ambient air
 Dielectric
 Ag top gate electrode

Ag Organic
Dielectric Semiconductor
S D

PET Substrate

3-layer-printed OTFTs
Thin and uniform printed dielectric layer enabled by the
coffee ring effect
1000
Drop Spacing

 Transistor driving voltage is proportional to 800


15m
25m
35m

the thickness of dielectric layer 45m


55m

600

Height [nm]
 Difficult to achieve a pin-hole free of thin 400

dielectric layer by printing method


200

 Coffee ring effect is usually undesirable 0

-60 -40 -20 0 20 40 60

Width [m]
600
1 Nozzle
550 2 Nozzles
3 Nozzles
500
450
400

Height [nm]
350
300
250
200
150
100
50
0
-50
-300 -200 -100 0 100 200 300
Organic Electronics 29 (2016) 114-119
Width [m]
3-layer-printed OTFTs mobility up to ~1 cm2/Vs at 15 V

Ag Dielectric thickness~ 250 nm


Dielectric
DPP-DTT
Max. Processing Temp. 140°C
S D

PET Substrate
Average mobility of 0.86 cm2/Vs (variation σ~15%) with
3-layer-printed OTFTs on/off ratio of 105 obtained at 15 V.
-4
10 10 70
VDS=-15 V VGS (V) 1.4 Standard deviation 0.15 (17%)
-5
10 60 -1
8
-3 1.2

Mobility (cm /Vs)


-6
10 50 -5
(10 A )
1/2

6 1.0
-7

2
-IDS (A)
-3

-7
40
-IDS (A)

10 -9 0.86
0.8
-11
4
1/2

10
-8 30 -13
(-IDS)

2 0.6
=1.0 cm /Vs -15
10
-9
2 20
0.4

10
-10 10
0 0.2

10
-11 0
2
0 2 4 6 8 10 12 14 16 0 2 4 6 8 10 12 14 16 18 20 420 OFETs (8 OFETs, 2%, mobility lower than 0.2 cm /Vs
are not counted for statistics)
-VG (V) VDS (V)

Channel length 5 µm, channel width 1 mm


Printed PMOS enhancement-load Inverter and relative
logic circuits

Simplest printing process and excellent stability


Lower output amplitude

Input
2 Output
0
Vdd -2

Vout -4

Vin -6

Voltage (V)
-8

-10

-12
Channel length L= 5 µm, -14
Channel width -16
 Drive transistor W=1 mm -18
 Load transistor W=200 µm, -0.03 -0.02 -0.01 0.00 0.01 0.02 0.03
Time (sec)
Vdd=-20V, 100 Hz
Printed logic gates NAND, AND, NOR and OR

0 Vin1 Table 1. Truth tables for NAND, AND, NOR and OR logic gates
Output for the different logic gates
-10
Vin 1 Vin 2 NAND AND NOR OR
-20 1 1 0 1 0 1
0 Vin2 1 0 1 0 0 1
-10 0 1 1 0 0 1
-20 0 0 1 0 1 0
0
NAND
Voltage (V)

-10 NAND NOR AND OR


-20
0 AND
-10
-20
0 NOR
-10
-20
0 OR
-10
-20
-0.03 -0.02 -0.01 0.00 0.01 0.02 0.03
Vdd=-30V Time (sec)
Printed PMOS inverter using screen printed resistor

Screen printed carbon ink for resistor


Printed inverter (Inkjet printed OFET/ Screen printed resistor)
Input
2
Output
0
3.0
Vdd -2

-4
2.5
Vout -6

Voltage (V)
Vin
Delay time (ms)

2.0 -8

-10

1.5 -12

-14

1.0 -16

-0.15 -0.10 -0.05 0.00 0.05 0.10 0.15


0.5 Time (sec)
OFET (L=5m, W=1mm), Screen printed resistor
0 1 2 3 4 5 10
0
Resistance of the external resistor (M) 9
-2
8
-4 7
Vout (V) -6 6

Gain
-8 5
Delay time is dominated by the resistance -10 4

-12 3
2
-14
1
-16
0
-14 -12 -10 -8 -6 -4 -2 0

Vin (V)
Development of printed CMOS inverter

3-Layer-Printed NDI2OD-T2
Ag
N type transistor SOG Dielectric
N-type semiconductor

S D

12 4.0 PET Substrate


0V
4V 1E-5
vDS=20 3.5
10 8V
12 V
1E-6
3-layer-printed OTFTs
16 V 3.0
20 V SQRT IDS (mA)
8
Log IDS (A)

1E-7 2.5
IDS()

6 2.0 Mobility Off-


1E-8 Dielect. Vth On-current
(cm2/Vs) current On/Off
1.5 Thick. (nm) (V) (A)
4 1E-9 @ bias=20 V (A)
1.0 800 0.01 12.8 2.5E-07 1.16E-12 2.1E+05
2 1E-10
0.5 450 0.05 10.9 3.2E-07 1.20E-12 2.6E+05

1E-11
300 0.05 9.7 5.0E-07 7.15E-12 7.0E+05
0 0.0
0 5 10 15 20 0 5 10 15 20 220 0.10 8.4 8.8E-06 6.24E-11 1.4E+05
VDS(V) VGS(V)
180 0.12 4.1 1.5E-05 6.70E-10 4.0E+04

Organic Electronics 29 (2016) 114-119


Development of printed CMOS inverter

Difficulties
 Compatible processing condition for
both P and N type materials
 Compatible IV characteristics
 Stability between P and N

Vin DPP-DTT
P-type semiconductor
NDI2OD-T2
N-type semiconductor
P N Vin

Ag Ag
Dielectric Dielectric
Vdd P Vout N Ground

Vdd Vout PET Substrate


Development of printed CMOS inverter

Printed CMOS driven at 10Hz (15V, exposed in air)


20
Initial
1 hr
 Full-swing output amplitude achieved 18 2 hrs
7 hrs
 Gain value of 24 obtained 16 80 hrs

 Air stability testing without encapsulation


14

12

Output (V)
10

8
24 24
10 V 6

21 15 V 21 4
20 V
2
18 25 V 18
0
-0.3 -0.2 -0.1 0.0 0.1 0.2 0.3
15 15 20 Time (sec)
Gain

Output
Vds(V)

18 Input
12 12
16
After 80 hrs
9 9 14

12
6 6
Vout 10

3 3 8

6
0 0
25 20 15 10 5 0 4

Vgs(V) 2

0
0.0 0.5 1.0 1.5 2.0 2.5
Time (sec)
Summary

 NRCSummary
developed printing process for 3-layer-printed OFETs, mobility of 1 cm2/Vs on
PMOS and 0.1 cm2/Vs on NMOS transistors have been achieved.

 Introduced coffee ring effect to achieve thin and uniform dielectric layer by inkjet
printing process.

 Gain value of 24 with a nearly full-swing of output voltage obtained from the printed
CMOS inverter.

 Demonstrated the air stable printed CMOS without encapsulation

Semiconductor

Printed circuits

Electrode Dielectric

Printed logic circuits for electronics integration


Thank you for your attention!

Question?

Dr. Ta-Ya Chu


Research Officer
Tel: 1-613-949-7558
ta-ya.chu@nrc-cnrc.gc.ca
www.nrc-cnrc.gc.ca

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